HORIBA's vacuum freeze-drying solutions include: the capacitance manometer VG-200 series which monitors the vacuum condition in the chamber and our gas monitor Micropole system which monitors the dry state. Both these products contribute to the quality and performance of the freeze-drying process where control and measurement is key.
Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry
Optical Emission Spectroscopy Etching End-point Monitor
Gas Monitor for Chamber Cleaning End Point Monitoring
Vapor Concentration Monitor
High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring
Camera Endpoint Monitor based on Real Time Laser Interferometry
Compact Process Gas Monitor
Plasma Emission Controller
Vapor Concentration Controller
Capacitance Manometer
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