PDF
0.98
MB
The Model PLCA-700 Liquid-Particle Counter
Author: Yoshihiro Kubo
– With the rapid advances in technology in the manufacturing world, at state-of-the-art production plants for semiconductors and other high-tech products, it has become necessary to control both the size and the concentration of particles in numerous types of chemical solutions. The types of solutions actually used in the production process frequently include acids, strong alkaline substances, and various organic solutions. The physical properties of these substances especially the refractive index, vary greatly, making it difficult to measure the particles in these solutions. Today we are faced with the problem of measuring extremely large volumes of solution that contain a relatively low concentration of particles that need to be checked. The traditional method of filtering the solutions to measure particles has a number of inherent problems that make it inadequate for today's needs. To meet. these needs, Horiba has developed and begun to produce the PLCA-700 of liquid-particle counters. The PLCA-700 Series measures particles using a laser side-scattering principle. This paper gives an overview of the PLCA-700 liquid-particle counter and discusses the underlying measurement principle, with an introduction to the calibration method of the unit.
(Same content in Japanese is in Readout No.4-Japanese edition-.)