CS-100 Series

CS-100 Series

Stand-alone Type Chemical Concentration Monitor

 

The CS-100 Series offers a complete lineup of high precision chemical solution concentration monitors for various solutions in cleaning and etching processes during semiconductor manufacturing. In addition to the high-speed response and compact design, measurement of each component concentration is conducted in real-time and the timing of chemical solution changes and automatic supply is warned with an alarm. The ability to perform short measurement cycles allows for accurate monitoring of concentration changes.

Example of chemicals can be measured

 

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
  • Concentration follow-up in real-time
  • Fully automatic measurements 
  • Comprehensive measure to eliminate air bubble during sequential measurements
  • A higher safety assurance by using 24 V DC
  • Lightweight and compact design
  • A higher overall yield
  • RoHS compliant

 

Model name

CS-100
Measurement principleAbsorption spectroscopic method
Sample temperature20 to 30 Degree C
Ambient temperature20 to 25 Degree C
ComponentsMax. 4 components
Chemical rangeMax. 4 ranges
CommunicationParallel I/O, Analog output, RS-232C
Analog output
(4-20 mA)
Max. 2 components
Dimension205(W) X 329(D) X 269(H)mm
Power sourceDC 24V
Consumable partsHalogen lamp
WavelengthUV/NIR
Wetted materialPTFE, PFA, Sapphire or Quartz

Schematics

 

 

Request for Information

Do you have any questions or requests? Use this form to contact our specialists. * These fields are mandatory.

Related products

CombiScope
CombiScope

AFM and inverted light microscopy

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

HD-960L
HD-960L

Dissolved Oxygen Monitor in Low Concentration

HD-960LR
HD-960LR

Dissolved oxygen concentration monitor series for semiconductor manufacturing

HE-480C-GC
HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-960CA
HE-960CA

Citric Acid Monitor

HE-960H-KOH
HE-960H-KOH

KOH Monitor

HE-960H-TM
HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960H-TM-S
HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960LC
HE-960LC

Carbon Sensor Conductivity Meter

HE-960LF / FS-09F-1/2
HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity meter

HE-960R-GC(W)
HE-960R-GC(W)

Carbon Sensor Resistivity Meter

HE-960RW-GC(W)
HE-960RW-GC(W)

2-Channel Resistivity Meter

HF-960EM
HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor

HF-960H
HF-960H

HF / HCl Concentration Monitor

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HF-SP-CU
HF-SP-CU

2-channel High Precision HF Concentration Monitor

HT-110
HT-110

Total Organic Carbon Monitor

HZ-960
HZ-960

Dissolved Ozone Monitor

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

ICP Neo
ICP Neo

ICP Software

OmegaScope
OmegaScope

The AFM optical platform

OPSA-150
OPSA-150

Organic Pollutant Monitor

SLIA-300
SLIA-300

Highly Sensitive Silica Monitor

SLIA-5000
SLIA-5000

SILICA ANALYZER

TPNA-500
TPNA-500

Automatic Total Nitrogen/Phosphorus Monitoring

TRIOS
TRIOS

Versatile AFM Optical Coupling

Ultima Expert LT
Ultima Expert LT

Affordable high performance ICP-OES

UP-100
UP-100

Micro Volume pH Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HU-200SS
HU-200SS

Field-installation Type MLSS Meter (Four-Wire Transmission)

HU-200TB-H
HU-200TB-H

Field-installation Type Turbidity Meter (Four-Wire Transmission, High-sensitivity)

HU-200TB-IM
HU-200TB-IM

Field-installation Type Turbidity Meter (Four-Wire Transmission, Immersion Type)

HU-200TB-W
HU-200TB-W

Field-installation Type Turbidity Meter (Four-Wire Transmission, For Wide Range)

HZ-960
HZ-960

Dissolved Ozone Monitor

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

OPSA-150
OPSA-150

Organic Pollutant Monitor

TPNA-500
TPNA-500

Automatic Total Nitrogen/Phosphorus Monitoring

U-50
U-50

Multi-parameter Water Quality Checker