APSA-370/CU-1 [High Sensitivity Model]

Ambient Hydrogen Sulfide (H2S) Monitor

APSA-370 with CU-1 High Sensitivity Model is high sensitivity gas analyzer for measurement of hydrogen sulfide (H2S) concentration at extremely low parts per billion level of concentration. APSA-370 with CU-1 uses an oxidation catalyst to convert hydrogen sulfide (H2S) into sulfur dioxide (SO2), which is later measured by ultraviolet fluorescence (UVF) method. Analyzer has installed into the sample line dehumidifier to reduce indication errors due to chanages in the atmospheric moisture concentration and to stabilize the catalytic reaction. This results into long-term stability of measurement. Measurement range 0 - 10 / 20 / 50 / 100 ppb and Lower Detection Limit 0.1 ppb enables application of the analyzer for the cleanroom airborn molecular contamination monitoring, ambient air background monitoring, monitoring of the cultural property preservation environment etc.

Application

  • Ambient air background monitoring
  • Cleanroom airborne molecular contamination monitoring
  • Monitoring of the cultural property preservation environment
Division: Ambient
Manufacturing Company: HORIBA, Ltd.
Base product: AP-370 series
  • High sensitivity and high stability
    A unique design of the detector and optical system realizes high sensitivity and high stability with low background
     
  • Reduced influence of the interfering components
    Built-in aromatic hydrocarbon cutter eliminates the influence from interfering components
    UV fluorescence detector resistant to moisture interference
     
  • Automatic calibration function
    Function is available when APSA-370 (High sensitivity model) is connected with standard gas generator SGGU-610
     
  • No need to control UV lamp intensity
    Incorporated UV lamp intensity compensator
     
  • Remote operation
    Remote operation is available by LAN connection terminal (option), RS-232C (option)
     
  • No adsorption solution or reagents required
     
  • No human errors due to fully automated measurement
     
  • Specially treated sampling system
    Special treatment for less chemical volatilization inside sampling tube to enable high precision of measurement

 

Related Industries

 

Related Application

ComponentHydrogen Sulfide
ModelAPSA-370/CU-1 (High sensitivity model)
PrincipleUV Fluorescence method + Oxidation catalyst
Range0 - 10 / 20 / 50 / 100 ppb
Lower detection limit (LDL)
*Typical value under certain conditions
0.1 ppb
Response time (T90)Within 5 minutes from CU-1 sample inlet
Displayed componentsInstantaneous value of H2S
Analog output4 - 20 mA DC or 0 - 1 V DC
Communication interfaceRS-232C or TCP/IP
Sample gas flowApprox. 0.7 L/min
Operation gasN/A
Calibration gasN2 based SO2 diluted by pure air from SGGU-610 or by ultra-pure air from gas cylinder
Ambient temperatureCleanroom temperature
Ambient humidityCleanroom humidity
PowerAC100 - 120 V, AC200 - 240 V
Configuration
(analyzer & calibration equipment)
APSA-370/CU-1 (High sensitivity model)
SGGU-610

CU-1: converter, SGGU-610: standard gas generator

Monitoring of Hydrogen Sulfide Airborne Molecular Contamination in Semiconductor Fabrication
Monitoring of Hydrogen Sulfide Airborne Molecular Contamination in Semiconductor Fabrication

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