D700uF

Micro Flow Pressure Insensitive Mass Flow Module

D700uF(Micro Flow) is designed for ≤ 5SCCM flow application. ​
≤ 5SCCM flow control has been very critical in high aspect ratio process.​
Specialized components and newly developed in-house low flow standard allow high accuracy flow control down to 0.025SCCM.

Segment: Semiconductor
Division: Fluid Control
Manufacturing Company: HORIBA STEC, Co., Ltd.
  • Down to 0.025SCCM flow control capability
    • Precise tuning gas control, enhance process tunability
  • ≤ 100ms Step-up Response & MFC-to-MFC deviation control​
    • Deliver high productivity and greater process performance​
  • In-House flow metrology
    • Reliable performance from all manufactured products
  • State Monitor Function
    • Provide more internal data for smarter failure prediction
  • Better Valve Shut-off and Corrosion Resistance by PFA nozzle​
    • Robustness with less particle risk reduce down time and optimize yield

 

*1:Please contact us for supported gas type and full scale flow rate.
*2:Flow rate accuracy can be guaranteed down to 0.1 SCCM N₂ equivalent.
*3:This is guaranteed value under 25 ℃ and ≤ 1.0 × 10-3 Pa(A).
*4:This is guaranteed under our conditions using calibration N₂ gas. Setting time may vary depending on the gas type and operating environment conditions.
*5:Pressure perturbation has to be smaller than 20 % pressure change per second and ±70 kPa/sec(±10 PSI/sec).
*6:EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH in Germany.

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