EC-5000 Series

EC-5000

Exhaust Pressure Controller

The EC-5000 series exhaust pressure controller can maintain a consistent pressure, of the user’s choice, within the chamber. The high-resolution stepper motor and unique butterfly valve ensure a fast, sensitive response to any pressure changes.

Segment: Semiconductor
Division: Fluid Control
Manufacturing Company: HORIBA STEC, Co., Ltd.

Benefits:

  • Suitable for high vacuum: stainless steel body
  • Corrosion resistant: models with PTFE bodies are also available
  • RoHS compliant.

When the exhaust flow rate is adjusted to optimal levels:

  • The resist is distributed in an even film
  • Secondary deposition of the mist is prevented
  • The diffusion of dangerous vapor is prevented.

There is less change in sensitivity caused by the accumulation of resist and other contamination compared with flow rate sensor control and the influence of turbulence and other noise is eliminated which enables superior, stable, responsive control.

 

Model                   EC-

5104

5105

5202

Compatible size

NW40

NW50

25 mm PTFE fitting

1 inch PTFE fitting

Materials at gas contact area

SUS316L, Fluoro rubber

PTFE, PEEK, Fluoro rubber

Conductance
(in vacuum area)

0.4 to 80L/s

0.6 to 200L/s

——

Outflow at 100 mm H2O
(fully closed)

20L/min

25L/min

3L/min

 

* This product is subject to Japan's Export Control Law (i.e. on its control list). Before it is exported from Japan to overseas or supplied to non-residents, an Export License must be obtained from the Ministry of Economy, Trade and Industry (METI) of Japan.

 

External Dimension

 

Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process

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