Compact Baking System
HORIBA's best-selling baking system has been developed to meet the requirements of today’s high technology industries. Without the need of a carrier gas, the system can provide stable vaporization of materials such as TEOS (at a rate of 600 SCCM) and H2O (at a rate of 2 SLM). For ease of access all device maintenance can be performed from the front of the unit.
Flow rate generated
H2O 2SLM, TEOS 600 SCCM (Max.)
Source tank volume
Heat regulation method
PID control by the heat regulator
Liquid surface detection method
Internal mass flow controller
Air pressure valve
Materials in liquid connection and gas contact area
20 to 35°C
Air pressure valve open/close, mass flow controller flow rate setting signal (0 to 5 V DC/0 to 100% F.S.), emergency stop signal, auto zero signal (option)
Temperature alarm, liquid level H.H. alarm, liquid level signal (H, M, L), READY signal, mass flow controller flow rate output signal ((0 to 5 V DC/0 to 100% F.S.), thermoregulated bath internal fan stop alarm, valve voltage monitor (option)
AC 100 V, single phase 50/60 Hz, 1.5 kVA
Auto-recharge system: Can be connected to LU series.
* The flow rate control range varies with the type of liquid.
* SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa).
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