Liquid Auto Refill System
The LU Series offers uninterrupted, safe and reliable delivery of the liquid precursor to liquid material baking systems and injection systems. This leads to increased uptime, reduced operator handling and reduced risk of process contamination.
The LU Series includes a function for automatically implementing a remaining liquid purge sequence.
Using the LU Series, product throughput and maintenance efficiency is improved.
TEOS, TMOB, TMOP, TEOP, BTBAS
Pressure movement from He gas
Gas supply pressure
For pressure movement: 0.3 to 0.6 MPa (G); For purge: 0.3 to 0.6 MPa (G), OP N2 0.6 to 0.7 MPa (G)
Maximum 5-gallon container can be attached (outside of production range)
Automatic supply/stop using external signal from supply system
Operation area display details
Pressure error display; When an alarm is triggered: Display hold function (manual reset); Liquid level display; Sequence, etc.
Refer to basic flow
AC 100 to 240 V, 50/60 Hz, 300 VA
AC 100 to 240 V breaker connection, signal receptacle
See external dimensions diagram
* Please make decisions regarding the specifications above after meeting with STEC.
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