CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

An inline, real-time optical fiber-based chemical concentration monitor that enables measurements of chemicals used in semiconductor manufacturing processes such as cleaning and etching.

Inline real-time measurements can be obtained. A single concentration monitor is capable of simultaneously measuring up to four types (chemicals or ranges), making it suitable for measurements in single wafer cleaning.

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Multi-monitoring
Measurements of up to four different substances (chemicals or ranges) are possible with a single concentration monitor.

Short measurement cycles and fast response time
Supports concentration management for 300mm processes with a measurement cycle of approximately 3 seconds. Precise concentration management for both multi-bath and single-bath/sheet-type cleaning equipment are supported.

One of two types can be chosen
The option is available to choose between two types: the inline cell type, which is directly integrated into the main piping and prioritizes real-time concentration tracking, or the cell unit type, which emphasizes stability and allows for feedback control using monitor outputs.

Model	CS-151F1	CS-152F1	CS-150F1
Target of measurement	SC-1 (ammonia/hydrogen peroxide aqueous solution)	SC-2 (hydrochloric acid/hydrogen peroxide aqueous solution)	SPM (sulfuric acid/hydrogen peroxide aqueous solution)
Target of measurement	Multi-monitoring with one unit of up to 4 types of chemical solutions or ranges possible.
Measurement principle	Absorption spectrometry
Concentration computation principle	Temperature-compensated multivariate analysis
Measurement range (mass %)	NH₃: 0.00% to 1.00% H₂O₂: 0.00% to 5.00% H₂O: 94.0% to 100.0%	HCI: 0.00% to 2.00% H₂O₂: 0.00% to 2.00% H₂O: 96.0% to 100.0%	H₂SO₄: 70.0% to 96.0% H₂O₂: 0.00% to 10.00% H₂O: 4.0% to 30.0%
Repeatability (mass %) (within ±1% room temperature)	NH₃: ±0.15% H₂O₂: ±0.30% H₂O: ±1.5%	HCI: ±0.15% H₂O₂: ±0.15 % H₂O: ±1.5%	H₂SO₄: ±0.50% H₂O₂: ±0.50% H₂O: ±1.5%
Repeatability (mass %) (within ±1% room temperature)	・Repeatability for the list above is for the cell unit type.Please contact us for the repeatability of the in-line cell type. ・Differences in the above list may occur depending on measurement range.(Please see our website for details.)
Sample solution temperature	20 to 80: (when using Inline cell) 20 to 30: (when using cell unit)
Measurement cycle	Approx. 3 seconds
Content of LCD and input	• 1st component: measured concentration value (%) •Error code • 2nd component: measured concentration value (%) •Parallel concentration alarm output invalid status • 3rd component: measured concentration value (%) •Serial/parallel status • 1st and 2nd components: concentration alarm status •Background compensation data
RS-232C serial input	• Serial/parallel status switching •Parallel concentration alarm output status • Measurement data transfer request (valid/invalid) • 1st and 2nd component concentration alarm setting •Target measurement solution switching
Parallel input	12 to 30 V DC (photocoupler insulated) • Parallel concentration alarm output • Target measurement solution switching • Background compensation
Parallel output	Open collector output (photocoupler insulated) • 1st component concentration alarm, 4 types Max. current when on: • 2nd component concentration alarm, 4 types DC 5 mA (no internal protection resistor) • Device error Max. impressed voltage when off: 30 V DC • Measuring • Target measurement solution type • Background compensation status
Solution temperature input	Terminal block connection (M3 terminal screws) • Platinum resistance temperature sensor: Pt100 (Pt100 sensor should be prepared by customers)
Analog output	• 1st component concentration alarm, 4 types: 4 to 20 mA • 2nd component concentration alarm, 4 types: 4 to 20 mA ✽We also support other measurement ranges. Please specify when ordering.
Fiber optic cable	Dedicated CS-100F1 Series fiber optic cable (25 ±15: installation temperature)
Sample cell	We can supply dedicated sample cells (inline cell or cell unit) for various kinds of chemical solutions.
Power supply	100 V to 230 V AC (single phase) ±10%, 50/60 Hz, approx. 100 VA
Dimensions	205 (W) x 329 (D) x 269 (H) mm 8.1 (W) x 13.0 (D) x 10.6 (H) in (excluding protruding part)
Weight	Approx. 11 kg