CS Series

The concentration monitoring of chemical solutions play an advanced role as a vital part of the "Monitor → Feedback → Control" process control in accordance to the evolution of semiconductor processes. HORIBA has a wide product lineup of chemical concentration monitors specialized for chemical concentration management from FEOL to BEOL in order to fulfil the clients’ needs.


more CS-900

Non-Contact Chemical Concentration Monitor

more CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

more CS-700

High Precision, High Stability Chemical Concentration Monitor

more CS-600F

Fiber Optic Type Chemical Concentration Monitor

more CS-100 Series

Stand-alone Type Chemical Concentration Monitor

more CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

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