CS-600F

Fiber Optic Type Chemical Concentration Monitor

An optical fiber-based chemical concentration monitor designed to measure chemicals used in semiconductor manufacturing processes such as cleaning and etching.

Measurements of high-temperature chemicals essential for cutting-edge wet processes can be achieved. Enabling quick, stable, and space-saving solutions, leading to the optimization and increased precision of chemical management.

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Stable measurement of high-temperature chemicals
Due to superior optical systems and algorithmic procedures, it has become possible to obtain stable measurements of chemical solutions even under the conditions of high temperature (20−80℃) without the need for adjustments or further processing. Additionally, it does not require the operator to cool the chemicals.

Up to six types of chemicals (chemicals or ranges) are supported
Measurements of up to six types of chemicals (chemicals or ranges) are possible with a single monitor. Desired types of chemicals or ranges can be freely specified for measurement, allowing for a wide range of measurement needs.

Free layout
With the flexibility to place and accommodate the installation space of chemical supply units or cleaning equipment, the light source unit and the monitor unit can be installed separately.

Reduced equipment downtime
By reducing the frequency of background adjustments in the inline measurements, equipment downtime is significantly reduced, greatly contributing to throughput improvement.

Model	CS-600F
Measurement principle	Absorption spectroscopic method
Calculation principle	Temperature compensation type multivariate analysis
Measurement target	NH₃/H₂O₂/H₂O (reperesentative specification) * Please contact HORIBA regarding other chemicals.
Measurement range	NH₃：0.00～1.20mass%、H₂O₂：0.00～5.50mass%、 H₂O：93.3～100.0mass%
Repeatability	NH₃：±0.05mass%、H₂O₂：±10mass%、H₂O：±1.0mass% Chemical temperature: Within ±1℃/1 hour
Sample solution temperature	20〜80℃
Measurement cycle	Approx. 3 seconds
LCD display	(1) Measured value (%) (2) Concentration alarm (HH/H/L/LL) (3) Error code (EXXX) (4) Chemical temperature (°C) (5) Serial/parallel communication status (P/S) (6) The times of background correction failure (CXXX)
Key input	(1) Concentration alarm setting (HH/H/L/LL) (2) Concentration value shift (3) Background correction (4) Hot water correction (5) Temperature dependent concentration shift
Parallel input	Input voltage of 12 V to 30 V DC by insulating with photo coupler (1) Parallel concentration alarm output (On/Off) (2) Switching chemical solution for measurement (including background correction) (3) Hot water correction
Parallel output	Transistor output (NPN open collector) by insulating with photo coupler Maximum current when powered ON: 5 mA DC (no internal protective resistance) Maximum voltage when powered OFF: 30 V DC (1) Concentration alarm (ON at HH/H/L/LL alarm) (2) Monitor error (OFF at error) (3) Measuring (ON at measurement) (4) Chemical solution type for measurement (5) Echo to hot water correction input (6) Warning (ON at occurred) (7) Background correction status 8) Hot water correction status
Serial input	RS-232C (1) Request for readout of measurement data (2) Select chemical solution type to be measured (3) Hot water correction
Serial output	RS-232C (1) Measured data No. (2) Chemical solution type (3) Concentration value (4) Error code (5) Chemical temperature
Analog output	4 mA to 20 mA In case of monitor error occurs, measurement is stopped or invalid chemical range is selected, the signal output is fixed at 1.5 mA. The load resistor must be 500 Ω maximum.
Chemical solution temperature input	Terminal block inlet (terminal screw M3) Platinum resistance temperature sensor: Pt100 (Three-conductor type, Class A) *Temperature sensor is not included.
Air (for operation and purge)	Connection port: 4 mm O.D. quick joint, Pressure: 0.2 MPa ±0.02 Mpa
Power source	100～230V AC（Single-Phase）、50/60Hz
Power consumption	Approx. 85 VA (transient electric current at the time of the start is excluded)
Weight	(Monitor) Approx. 3.6 kg (Lamp unit) Approx. 2.8 kg (Sample cell) Approx. 1.2 kg
Ambient temperature	(Monitor, Lamp unit) 20°C to 30°C (Sample cell, Optical fiber) 20°C to 35°C (Sudden temperature change should be avoided, within ±1°C/1 hour)
Ambient humidity	(Monitor, Lamp unit, Sample cell) 40% to 70% (Should be no dew condensation)
Slanting angle at installation	(Monitor, Lamp unit) within ±1°
Optical fiber	Length: 5 m, minimum bend radius: R 150 mm