CS-900

Non-Contact Chemical Concentration Monitor

A chemical concentration monitor designed to measure chemicals used in semiconductor manufacturing processes such as cleaning and etching in a non-contact manner.

Enabling safe and stable concentration monitoring without the risk of chemical leaks or contamination by measuring flowing chemicals inside the pipes without direct contact.

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Non-contact measurement structure
By preventing chemical leaks and contamination, safe and stable measurements become possible. Furthermore, installation can be performed without cutting the piping, reducing installation time and minimizing the workload during implementation.

Stable measurement of high-temperature chemicals
With a revamped optical system and improved computational processing, high-temperature chemicals (20 to 80°C) essential for cutting-edge chemical processing can be reliably measured with stability.

Prolonged lifespan of light sources
Prolonged lifespan through the adoption of LED lamps (with a 5-year warranty) has been achieved.

Space-saving
Light sources and spectrometers are integrated into the cell unit, contributing to a space-saving design. The display unit is a panel-mount type.

Model name		Non-contact type chemical concentration monitor
Model		CS-900
Measurement method		Absorption spectroscopy
Concentration calculation		Temperature compensated multivariate analysis
Measurement range/ Repeatability (mass%)	Model name	Component	Measurable range	Repeatability	Analog output range
	CS-900-1P-1P25P5	NH₃	0.00%-1.20%	±0.05%	0.00-10.00
		H₂O₂	0.00%-5.50%	±0.10%	0.00-10.00
		H₂O	93.3%-100.0%	±1.0%	-
	CS-900-1P-P8P8	NH₃	0.20%-0.80%	±0.03%	0.00-1.00
		H₂O₂	0.20%-0.80%	±0.03%	0.00-1.00
		H₂O	98.4%-99.6%	±0.3%	-
Conditions of measurement	1) Measurement Frequency: every 3 seconds 2) Moving average : 16 times
Tube	PFA tube 1inch or 3/4inch (Do NOT use anti-static type PFA tube)
Sample condition*¹	Sample temperture : 20 to 80°C Sample temperture, Atmospheric temperture fluctuation : ±1 degree C (period of time: 1 hour) Sample pressure : Less than 0.2 MPa (G) Sample pressure fluctuation : Within 0.02 MPa
Power source	DC 24V
Power consumption	Apporox. 30W (Transient electric current at the time of start is excluded)
Weight	Display unit : Apporox. 0.9kg Sensor unit: Apporox. 2.9kg
Dimension (WxDxH)	Display unit : 96x135x96mm Sensor unit: 238x135x190mm
Slanting angle	Sensor unit: Vertical direction within ±3 degree Lateral direction 0 to 90 degree
Light source	5years
communication	Parallel I/O, RS-232C, Analog output

Size: 2.03 MB

〈Catalog〉Non-Contact Chemical Concentration Monitor CS-900

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