HE-960R-GC

Carbon Sensor Resistivity Meter

The ideal resistivity meter for the cleaning process in a one-bath cleaning system.

Concerns about contamination from metal impurities are eliminated with the use of a glass carbon sensor with excellent chemical resistance, contributing to rigorous management of the cleaning process.

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Sensor with excellent chemical resistance

The electrode material is 100% carbon, making it compatible with various cleaning solutions, including hydrofluoric acid and hydrogen peroxide.

Metal contamination-free

Due to the use of specialized carbon as the electrode material, there is no concern of metal contaminants.

Abundant temperature compensation function

Offering the option to select between pure water, ultra-pure water with impurities, and custom temperature compensation, enables temperature compensation tailored to the measuring liquid.

Model	HE-960R-GC(W)
Measurement range	0.000 - 0.200 / 0.00 - 2.00 / 0.00 - 20.00 / 0.0 - 100.0 MΩ・cm
Power supply	Rated voltage 24 V DC 5 W (max)
Structure	Indoor-use panel installation type Panel: IP65 dust and water proof structure
Protective structure	Panel: IP65 (IEC60529, JIS C0920)
Conforming standards	CE Marking FCC Rule
External dimensions	96 (W) mm x 96 (H) mm x 115 (D) mm Case depth: approx. 105 mm (when panel-mounted)
Mass	Approx. 500 g
Compatible sensors	ERF-series specific resistance GC sensor