HF / HCl Concentration Monitor HF-960H

HF / HCl Concentration Monitor

Accurately measures concentrations of HF and HCl used in semiconductor manufacturing and other processes. The dedicated FES-510 series sensor is highly resistant to chemicals, making this unit ideal for the management of HF and HCl. Measurement range: 0 -10%.


Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.


  • Measurement range : 0 - 10 %
  • Automatic display range switching
  • Enables four types of measurement: HF concentration, HCl concentration, conductivity, and temperature
  • 24 V DC power supply
  • RoHS compliant



Measurement rangeHF: 0 - 10%, HCl: 0 - 10%, Conductivity: 0 - 1000mS/cm
Power supply24 V DC ±10%, 10 W (max.)
Protective structurePanel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)
MassApprox. 550 g
Conforming standardsCE marking, FCC Part 15
Compatible sensorsFES-510 Series (flow-type carbon sensor)


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