2D Materials

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2D material is defined as a crystalline material consisting of a single unit cell layer of that material. In particular, graphene and transition metal dichalcogenides (TMDCs) are attracting attention as next-generation semiconductor materials. When used as a semiconductor, precise structural analysis is important because its crystal structure and crystallinity greatly affect performance.

Structural Analysis  |  Film Thickness and Quality  |  Crystal Defect Analysis  |  Foreign Object Detection/Analysis

Structural Analysis

Film Thickness and Quality

In the advancement of thin film technology through miniaturization, we propose solutions for achieving high film deposition control, such as in-situ evaluation during the film deposition process and evaluation of thin films at the Ångström order level.

Membrane information obtained using a spectroscopic ellipsometer

Crystal Defect Analysis

Reducing defects and precisely controlling impurities have become increasingly important in semiconductor devices for high-speed communication. We will introduce analysis cases illustrating this.

Foreign Object Detection/Analysis

Defects in wafers can also be caused by foreign matter, and we will introduce a method of microscopic elemental analysis to identify the cause of defects.

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Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm

LabRAM Odyssey Nano
LabRAM Odyssey Nano

AFM-Raman for physical and chemical imaging

PD Xpadion
PD Xpadion

Reticle / Mask Particle Detection System