CS-900

비접촉 화학물질 농도 모니터

CS-900은 차세대 습식 공정 모니터입니다. HORIBA는 수율을 높이는 화학농도 관리 장비를 제공해 공정 최적화에 기여하고 있습니다. HORIBA는 반도체 WET 공정에서 요구되는 화학적 농도 제어를 충족하기 위해 기존 센서 설계를 통해 안정적인 측정과 작업자 안전성을 유지하면서 소형 장비 설계로 니즈에 맞는 보다 높은 기능성을 실현하고 있습니다.

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Completely non-contact and highly stable

Zero contamination is made possible by directly connecting a sensor externally to the PFA piping. This removes the need for plumbing construction when attaching the sensor, which reduces chemical accidents. In addition, by upgrading the optical system, the equipment has been made more compact while retaining the original specifications of CS-600F*¹.

High quality and stable measurement

Zero contamination
Equipped with temperature compensation to enable stable measurement
Equipped with HORIBA original algorithm to compensate influence of air bubbles.
Same repeatability and stability with conventional CS-600*¹

Suppression of vibration effects

HORIBA adopts an optical system structure that is strong against misalignment and synergizes with HORIBA original piping construction.

Space saving

Light source and light detector have been integrated into cell unit.
Panel mount display (9.6cm x 9.6cm)

Longer lifespan of light source.

Use of LED lamp Increases lifespan (5 years warranty)

Improves work safety

Semi-annually BG compensation cycle
Piping installation is not required when installing the product, which helps to reduce accidents such as chemical leak.

*¹CS-600 is HORIBA's optical liber type chemical concentration monitor.

Optical design and amplifier without using optical fiber coupled with miniaturization of sensor increase degree of freedom in installation

Direct and stable measurement is made possible for chemical with wide temperature range (20°C to 80°C)

Stability

Measurement Condition
Measurement Frequency: every 3 seconds
Moving Average: 16 times
Temperature: room temperature
Pipe Diameter: 3/4 inch

Initial Sample Concentration
NH₃ : 0.95% H₂O₂ : 5.15% H₂O: 93.9%

Measurement result
Sample (real liquid) measured for 1 hour shows excellent stability.

Easy installation and removal made possible

Model name		Non-contact type chemical concentration monitor
Model		CS-900
Measurement method		Absorption spectroscopy
Concentration calculation		Temperature compensated multivariate analysis
Measurement range/ Repeatability (mass%)	Model name	Component	Measurable range	Repeatability	Analog output range
	CS-900-1P-1P25P5	NH₃	0.00%-1.20%	±0.05%	0.00-10.00
		H₂O₂	0.00%-5.50%	±0.10%	0.00-10.00
		H₂O	93.3%-100.0%	±1.0%	-
	CS-900-1P-P8P8	NH₃	0.20%-0.80%	±0.03%	0.00-1.00
		H₂O₂	0.20%-0.80%	±0.03%	0.00-1.00
		H₂O	98.4%-99.6%	±0.3%	-
Conditions of measurement	1) Measurement Frequency: every 3 seconds 2) Moving average : 16 times
Tube	PFA tube 1inch or 3/4inch (Do NOT use anti-static type PFA tube)
Sample condition*¹	Sample temperture : 20 to 80°C Sample temperture, Atmospheric temperture fluctuation : ±1 degree C (period of time: 1 hour) Sample pressure : Less than 0.2 MPa (G) Sample pressure fluctuation : Within 0.02 MPa
Power source	DC 24V
Power consumption	Apporox. 30W (Transient electric current at the time of start is excluded)
Weight	Display unit : Apporox. 0.9kg Sensor unit: Apporox. 2.9kg
Dimension (WxDxH)	Display unit : 96x135x96mm Sensor unit: 238x135x190mm
Slanting angle	Sensor unit: Vertical direction within ±3 degree Lateral direction 0 to 90 degree
Light source	5years
communication	Parallel I/O, RS-232C, Analog output