HE-960RW

패널 장착형 저항계(4-Wire Transmission, 2채널)

HE-960RW는 저항성 센서(ERF 시리즈)를 연결하고 검수 내 저항성과 온도를 측정합니다.
저항계(Resistivity meter)는 반도체 제조에 사용되는 초순수 공장에서 사용되는 고정밀 물 모니터링과 같은 용도에 적합합니다.
초순수 비저항 측정을 위하여 고정밀 설계된 온도 측정 회로와 대폭 개선된 온도 보정 기능이 적용되었습니다.

- 측정범위 저항률 : 0~100.0mΩ·cm, 0~1000kΩ·m
- 온도 : 0 ~ 100℃

Division: Process Water
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
  • Highly precise, highly stable temperature compensation function
    Control fluctuations in measured values in the region of 18 MΩ·cm resistivity to within a minimum 0.02 MΩ·cm over a water temperature range of 15 °C to 35 °C.
  • 50 m extension possible for sensor cables
  • 2-channel simultaneous measurement
  • Independent 4 contact alarms
  • Abundant in-house calibration equipment
    •HORIBA Advanced Techno resistivity meters are only shipped after cellconstant inspection is performed on the resistivity sensors and inspectionfor temperature sensor instrumental errors is implemented using calibration equipment that has been adjusted with high-traceability reference equipment.
    •The sensors can also be combined with a converter for integrated calibration in advance of shipping.
  • Communication device ability (RS-485)
  • Utilization of lead-free solder
Product nameIndustrial 2-channel specific resistance meter
ModelHE-960RW
Measurement
method
Electrode type (2-electrode method)
Sensor input2 channels (for concurrent measurement with sensors isolated each other)
Cell constant0.01/cm
Temperature sensor
specifications
Platinum resistance 1000 Ω/0℃
Measuring rangeMeasurement unitkΩ•m0 to 20.00 to 200.00 to 1000 *
MΩ•cm0 to 2.000 to 20.000 to 100.0 *
*: Measurable without temperature compensation
Temperature    
  
0℃ to 100℃
(The number of digits after the decimal point is selectable from one and two. The range of measurements is −20℃ to 120℃.)
Desalination rate0% to 100%
Temperature: 0℃ to 100℃ (Select your desired decimal point from 0, 1, and 2 digits.)
RepeatabilityWithin ±0.1% of the full scale (in equivalent input)
LinearityWithin ±0.5% of the full scale (in equivalent input)
Transmission
output
Number of outputs: 2
4 mA to 20 mA DC/0 mA to 20 mA DC, input/output isolated type
Maximum load resistance: 900 Ω
Transmission output range: Freely selectable within the measurement range
(Negative terminals of each transmission output channel are connected inside and thus have the same electric potential.)
Contact outputNumber of outputs: 4
Alarm contact outputs (R1, R2, and R3)
  Contact type: relay contact, SPST (1a)
  Contact rating: 240 V AC, 3 A and 30 V DC, 3 A (resistance load)
  Contact function: selectable from the upper/lower limit action (ON/OFF control), delay, and hysteresis
  Selectable from the selected measurement, anomaly alarm, and maintenance.
Alarm contact output (R4)
  Contact type: relay contact, SPDT (1c)
  Contact rating: 240 V AC, 3 A and 30 V DC, 3 A (resistance load)
  Contact function: selectable from the upper/lower limit action (ON/OFF control), delay, and hysteresis
  Selectable from the selected measurement, anomaly alarm, and maintenance.
  (However, R1 and R2, and R3 and R4 share the common contacts respectively.)
Calibration functionSpecific resistance: Based on the specified compensation coefficient for cell constant (parameter input)
Temperature: Calibrated by comparing with the reference thermometer
Communication
output
RS-485 input/output
Transmission
output hold feature
  • Previous value hold
  • Optional value hold
    Selectable from the above (However, only the previous value hold is available in the maintenance mode.)
Self-diagnosis
function
  • Sensor diagnosis
    Short-circuit and disconnection of the temperature sensor
  • Out of the measurement range
  • Converter error
Temperature
compensation
  • Temperature compensation for extra-deionized water and impurities
      Select the temperature characteristics of impurities
      - NaCl temperature characteristics
      - Arbitrary temperature coefficient entry (temperature coefficient: 5%/℃)
      Reference temperature: 5℃ to 95℃
  • No temperature compensation is performed.
Temperaturecompensated
range
0℃ to 100℃
Extra deionized
water specific
resistance selection
Measurement
unit
kΩ•m182.3 (standard), 181.8, 182.4Select from options shown on the left.
MΩ•cm18.23 (standard), 18.18, 18.24
Clipping functionWhen the measured value is above the upper limit of the measurement range derived from the specified specific resistance, the specified resistance is used as the measured value.
Ambient
temperature
−5℃ to 45℃
Relative humidity20% to 85% (without dew condensation)
Storage
temperature
−25℃ to 65℃
Power supplyRated voltage 100 V to 240 V AC, 50/60 Hz, 10 VA (max.)
StructureIndoor-use panel installation type
Panel case: ABS, Terminal: PBT
Panel: IP65 dust and water proof structure
Protective structurePanel: IP65 (IEC60529, JIS C0920)
Rear case: IP20, Terminal:IP00
Class II device (IEC61010-1)
Pollution level 2 (IEC61010-1)
Conforming
standards
CE MarkingEMC Directives: EN61326-2-3
Low Voltage Directive: EN61010-1
RoHS Directive: EN50581
FCC RuleFCC Part15
External
dimensions
96 (W) mm × 96 (H) mm × 115 (D) mm
Case depth: approx. 105 mm (when panel-mounted)
MassApprox. 550 g
Compatible sensorsERD/ERF-series specific resistance sensor, cell constant 0.01/cm

제품 문의

HORIBA제품의 자세한 정보를 원하시면, 아래의 양식에 내용을 입력을 부탁드립니다.

* 는 필수입력항목입니다.

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