D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

중요한 반도체 제조 공정에서는 미래 혁신과 최첨단 메모리 및 논리 소자의 실험실-팹 전환을 가능하게 하는 정밀 가스 유량 제어 장치를 지속적으로 요구하고 있습니다. 호리바는 고객의 과제를 지원하기 위해 D500MG의 상위 호환 모델인 새로운 압력 기반 MFC D700MG를 제안합니다.

Segment: Semiconductor

Division: Fluid Control

Manufacturing Company: HORIBA STEC, Co., Ltd.

Selection of countries and territories where this product is available:
China,Germany,Ireland,Israel,Italy,Japan,Korea (South),Malaysia,Singapore,Taiwan,United Kingdom,United States
View the complete list here.

On-Tool Gas and Full Scale Configuration Change *Only EtherCAT
- Provide flexibility to process optimization
100ms Step-up Response & MFC-to-MFC deviation control
- Deliver high productivity and greater process performance
MRMG functionality for small flow rate(Bin101 – Bin105)
- Provide flexibility to process requiring small flow rate
Better Valve Shut-off and Corrosion Resistance by PFA nozzle
- Robustness with less particle risk reduce down time and optimize yield

State Monitor Function
- Provide more internal data for smarter failure prediction

Output items of state monitor function

Flow/Pressure zero adjustment counts

Valve drive counts

Record of max/min P0,P1,P2 pressure

Record of max/min Block temperature

Total time over/below pressure spec.

Total time over/below temperature spec.

Total working time

Total control time

Total flow time (per calibration instance)

Total flow rate (per calibration instance)

Go to External Drawing

*1 Flow rate accuracy is traceable only down to 2 SCCM, hence actual gas accuracy not guaranteed below 2 SCCM.
*2 This is guaranteed value under 25 ℃ and ≤ 1.0 × 10^-3 Pa (A).
*3 Setting time is MFC output signal and N2 gas. Other detail definition follows setting time of "SEMI Standard E17-1011 Section 4.1.4".
*4 Pressure perturbation has to be smaller than 20 % pressure change per second and ±70 kPa/sec (±10 PSI/sec).
*5 EtherCAT^® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH in Germany.

*1 Flow rate accuracy and repeatability of Bin#14-15 are guaranteed only for N2 calibration gas.
*2 This is guaranteed value under 25 ℃ and ≤ 1.0 × 10^-3 Pa (A).
*3 Setting time is MFC output signal and N2 gas. Other detail definition follows setting time of "SEMI Standard E17-1011 Section 4.1.4".
*4 Pressure perturbation has to be smaller than 20 % pressure change per second and ±70 kPa/sec (±10 PSI/sec).
*5 EtherCAT^® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH in Germany.