CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

The CS-100F1 Series is equipped with fiber optics cable based on the CS-100 Series. It offers real-time, in-line measurements by directly integrating the sample cell into the cleaning system piping and by using a fiber optic cable for light signal transmission. A single concentration monitor can take up to four measurements and monitoring of multiple chemical solutions in a single-bath or single-wafer cleaning system is also possible.

Example of chemicals can be measured

 

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
  • Concentration follow-up in real-time using in-line cells
    Real-time concentration monitoring is made possible by using an in-line cell that directly connects to the main piping of the cleaning system.
  • Multi monitoring of up to four types
    A single monitor can measure up to four types of chemical solutions or ranges. You can monitor the concentrations of more than one chemical solution (or differing chemical solution ratios) in a single lot, like single-bath or single-wafer cleaning system.
  • Cell unit type for higher accuracy
    Emphasizing stability, a cell unit type is also available that supports feedback control using a monitor output. It is also possible to keep the chemical solution concentration within an accepted range and eliminate unnecessary chemical solution changes.
  • Safe installation by complete isolation of electrical and measurement sections
  • RoHS compliant
ModelCS-151F1CS-152F1CS-150F1
Target of
measurement
SC-1
(ammonia/hydrogen peroxide
aqueous solution)
SC-2
(hydrochloric acid/hydrogen
peroxide aqueous solution)
SPM
(sulfuric acid/hydrogen
peroxide aqueous solution)
Multi-monitoring with one unit of up to 4 types of chemical solutions or ranges possible.
Measurement principleAbsorption spectrometry
Concentration computation
principle
Temperature-compensated multivariate analysis
Measurement range
(mass %)
NH3: 0.00% to 1.00%
H2O2: 0.00% to 5.00%
H2O: 94.0% to 100.0%
HCI: 0.00% to 2.00%
H2O2: 0.00% to 2.00%
H2O: 96.0% to 100.0%
H2SO4: 70.0% to 96.0%
H2O2: 0.00% to 10.00%
H2O: 4.0% to 30.0%
Repeatability (mass %)
(within ±1% room temperature)
NH3: ±0.15%
H2O2: ±0.30%
H2O: ±1.5%
HCI: ±0.15%
H2O2: ±0.15 %
H2O: ±1.5%
H2SO4: ±0.50%
H2O2: ±0.50%
H2O: ±1.5%
・Repeatability for the list above is for the cell unit type.Please contact us for the repeatability of the in-line cell type.
・Differences in the above list may occur depending on measurement range.(Please see our website for details.)
Sample solution temperature20 to 80: (when using Inline cell) 20 to 30: (when using cell unit)
Measurement cycleApprox. 3 seconds
Content of
LCD and input
• 1st component: measured concentration value (%)   â€¢Error code
• 2nd component: measured concentration value (%)  •Parallel concentration alarm output invalid status
• 3rd component: measured concentration value (%)  •Serial/parallel status
• 1st and 2nd components: concentration alarm status •Background compensation data
RS-232C serial input• Serial/parallel status switching   â€ƒâ€ƒâ€ƒâ€ƒâ€ƒâ€ƒâ€ƒâ€ƒâ€ƒâ€¢Parallel concentration alarm output status
• Measurement data transfer request         (valid/invalid)
• 1st and 2nd component concentration alarm setting  •Target measurement solution switching
Parallel input12 to 30 V DC (photocoupler insulated)        • Parallel concentration alarm output
                          • Target measurement solution switching
                          • Background compensation
Parallel outputOpen collector output (photocoupler insulated)     • 1st component concentration alarm, 4 types
Max. current when on:                 â€¢ 2nd component concentration alarm, 4 types
  DC 5 mA (no internal protection resistor)        â€¢ Device error
Max. impressed voltage when off: 30 V DC       â€¢ Measuring
                           â€¢ Target measurement solution type
                           â€¢ Background compensation status
Solution temperature inputTerminal block connection (M3 terminal screws)
• Platinum resistance temperature sensor: Pt100 (Pt100 sensor should be prepared by customers)
Analog output• 1st component concentration alarm, 4 types: 4 to 20 mA
• 2nd component concentration alarm, 4 types: 4 to 20 mA
✽We also support other measurement ranges. Please specify when ordering.
Fiber optic cableDedicated CS-100F1 Series fiber optic cable (25 ±15: installation temperature)
Sample cellWe can supply dedicated sample cells (inline cell or cell unit) for various kinds of chemical solutions.
Power supply100 V to 230 V AC (single phase) ±10%, 50/60 Hz, approx. 100 VA
Dimensions205 (W) x 329 (D) x 269 (H) mm 8.1 (W) x 13.0 (D) x 10.6 (H) in (excluding protruding part)
WeightApprox. 11 kg

Note: Please consult us regarding concentration monitors for chemical solutions other than those given above.

Schematics

Concentration monitor

Inline cell                                                                                     Cell unit

              

Request for Information

Do you have any questions or requests? Use this form to contact our specialists. * These fields are mandatory.

Related products

CombiScope
CombiScope

AFM and inverted light microscopy

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

HD-960L
HD-960L

Dissolved Oxygen Monitor in Low Concentration

HD-960LR
HD-960LR

Dissolved oxygen concentration monitor series for semiconductor manufacturing

HE-480C-GC
HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-960CA
HE-960CA

Citric Acid Monitor

HE-960H-KOH
HE-960H-KOH

KOH Monitor

HE-960H-TM
HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960H-TM-S
HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960LC
HE-960LC

Carbon Sensor Conductivity Meter

HE-960LF / FS-09F-1/2
HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity meter

HE-960R-GC(W)
HE-960R-GC(W)

Carbon Sensor Resistivity Meter

HE-960RW-GC(W)
HE-960RW-GC(W)

2-Channel Resistivity Meter

HF-960EM
HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor

HF-960H
HF-960H

HF / HCl Concentration Monitor

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HF-SP-CU
HF-SP-CU

2-channel High Precision HF Concentration Monitor

HT-110
HT-110

Total Organic Carbon Monitor

HZ-960
HZ-960

Dissolved Ozone Monitor

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

ICP Neo
ICP Neo

ICP Software

OmegaScope
OmegaScope

The AFM optical platform

OPSA-150
OPSA-150

Organic Pollutant Monitor

SLIA-300
SLIA-300

Highly Sensitive Silica Monitor

SLIA-5000
SLIA-5000

SILICA ANALYZER

TPNA-500
TPNA-500

Automatic Total Nitrogen/Phosphorus Monitoring

TRIOS
TRIOS

Versatile AFM Optical Coupling

Ultima Expert LT
Ultima Expert LT

Affordable high performance ICP-OES

UP-100
UP-100

Micro Volume pH Monitor

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HU-200SS
HU-200SS

Field-installation Type MLSS Meter (Four-Wire Transmission)

HU-200TB-H
HU-200TB-H

Field-installation Type Turbidity Meter (Four-Wire Transmission, High-sensitivity)

HU-200TB-IM
HU-200TB-IM

Field-installation Type Turbidity Meter (Four-Wire Transmission, Immersion Type)

HU-200TB-W
HU-200TB-W

Field-installation Type Turbidity Meter (Four-Wire Transmission, For Wide Range)

HZ-960
HZ-960

Dissolved Ozone Monitor

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

OPSA-150
OPSA-150

Organic Pollutant Monitor

TPNA-500
TPNA-500

Automatic Total Nitrogen/Phosphorus Monitoring

U-50
U-50

Multi-parameter Water Quality Checker