VG S Series

Capacitance Manometer

Absolute pressure measurement is crucial for most of vacuum processes in various industries including Semiconductor, FPD, HDD, PV and Coating. A capacitance manometer determines the total pressure from the deformation of the diaphragm that occurs when a pressure difference is applied to both side of the diaphragm. The strong points of the capacitance manometer over other methods are:

•Higher precision

•Less gas dependence in pressure output

•Relatively resistant to corrosive gases

Segment: Semiconductor
Manufacturing Company: HORIBA STEC, Co., Ltd.
  • Compact self heating design  *VG-200S Series
  • Original signal processing method for accurate measurement
  • SUS316L diaphragm
  • Selectable from temperature-controlled (55, 100°C) or non-heating type  *VG-200S Series
  • Temperature settings optimized for materials and processes  *VG-500S Series
  • ONE PUSH ReZero
  • Power requirements +/-15VDC or 24VDC
  • CE & RoHS compliant
Sterilization Process in Food and Beverage Manufacturing
Sterilization Process in Food and Beverage Manufacturing
Vacuum Monitoring in Dryer Equipment for Freeze Dry in Pharmaceuticals and Medicine Manufacturing
Vacuum Monitoring in Dryer Equipment for Freeze Dry in Pharmaceuticals and Medicine Manufacturing

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