Facility / Sub-Fab

The semiconductor industry uses many liquid/gaseous chemicals to manufacture devices. These chemicals require specific treatment from the perspective of environmental protection and air pollution prevention. HORIBA's analytical instruments contribute to society by measuring residual chemical substances after exhaust gas and wastewater treatment.

"Measurement" is significant to keep the environment conservation.
HORIBA's measuring techniques contribute to the safe and secure work environment such as clean room, water discharge, and air ventilation.

N₂ Purge System

 

 

 

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