Managing impurities in bulk gases such as high-purity O2 and N2 used in semiconductor factories is extremely important from the perspective of product quality control during operations. HORIBA products, which enable ultra-high sensitivity and high-precision continuous measurement, are used not only in liquefied gas tanks but also to manage trace impurities (CO, CO2, CH4) in high-purity gases from air separation units.
CO, CO2, CH4 Spurengas Analysator