HE-960H-PA
Phosphoric Acid Monitor
A phosphoric acid concentration monitor used in the etching process. (purified phosphoric acid solution)
Employing a glass carbon sensor to minimize polarization effects at high concentrations, enabling concentration measurements in the range of 80–90 wt% for phosphoric acid alone.
Segment: Semiconductor
Abteilung: Wet Process Control
Produktionsfirma: HORIBA Advanced Techno Co., Ltd.
Sensor with excellent chemical resistance
Makes use of a chemical resistant glass carbon sensor.
High precision
Capable of accurately measuring high-concentration phosphoric acid (80–90wt% within a temperature range of 20–100°C).
Concentration conversion function
Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with temperature characteristics. It is particularly suitable for the dilution management of low-concentration chemicals.
