High Precision, High Stability Chemical Concentration Monitor CS-700


HORIBA CS-700 化学药液浓度计能够对先进半导体制程中使用的复杂化学药液的单个化学成分进行高性能测量。
通过改进 HORIBA 的光谱测量技术,CS-700 测量性能提升高达 5 倍。

事业部: 半导体
产品分类: 湿法过程控制
制造商: HORIBA Advanced Techno Co., Ltd.
  • 实时、高性能检测多达 8 种组分
  • 无需试剂,零样品消耗,降低拥有成本
  • 安装简单,即装即用

Measurement Range and Repeatability

Unit : mass%

 ComponentMeasurable rangeRepeatability
1st solutionHNO330.0 - 34.0±0.5
HF2.00 - 4.00±0.10
H3PO435.0 - 39.0±0.6
H2SiF60.00 - 3.00±0.50
H2O25.0 - 33.0±1.0

Conditions of measurement
1) Measurement interval: approx. 8 sec.
2) Moving average time :10 times
3) Atmospheric temperature, chemical temperature fluctuation: within +/- 1 degree C (period of time: 1hour). Sudden temperature change should be avoided
4) Condition of sample temperature: 20 to 30 degree C

  • Repeatability is the maximum deviation from average measured value over a 1 hour continuous measurement period.
  • The values in the above table are assigned analog output values between 4 - 20 mA. (makimum resistance of 500Ω)

Specifications Comparison with Previous Model


Measurement principleAbsorption spectroscopic methodAbsorption spectroscopic method
Sample temperature20 to 30 Degree C20 to 30 Degree C
Ambient temperature20 to 25 Degree C20 to 30 Degree C
ComponentsMax. 4 componentsMax. 8 components
Chemical rangeMax. 4 rangesMax. 6 ranges
CommunicationParallel I/O, Analog output, RS-232CParallel I/O, Analog output, RS-232C
Analog output
(4-20 mA)
Max. 2 componentsMax. 6 components
Dimension205(W) X 329(D) X 269(H)mm218(W) X 391(D) X 213(H)mm
Power sourceDC 24VDC 24V(Same connecter of CS-100)
Consumable partsHalogen lampHalogen lamp (Same as CS-100 type)
Wetted materialPTFE, PFA, Sapphire or Quartz,PTFE, PFA, Sapphire,
Kalrez 4079 O-ring



如您有任何疑问,请在此留下详细需求信息,我们将竭诚为您服务。 * 这些字段为必填项。