HORIBA - Semiconductor

Semiconductor Processing

Providing Solutions At Every Stage Of The Semiconductor Manufacturing Process From Start To Finish

Semiconductors are the key evolving components in the industry today. HORIBA has kept its sights keenly focused on this micro world. Specialists in each field; we have pursued proprietary engineering projects in a wide range of areas that include evaluation and analysis, purity of ultra-pure water, composition of liquids and gases, and more broadly, environmental and safety. With our sights set clearly on the overall process, we have developed a line-up of analytical equipment, fluid control and measuring systems tailored to every stage of the semiconductor manufacturing process in response to stringent quality control requirements. In all stages, from materials evaluation through to final inspection, our products help maintain high efficiency in the manufacture of leading-edge electronics devices.

HORIBA's wide range of measuring techniques support your fabrication process by providing you with the critical data that helps guarantee your process efficiency.

Facilities

Facilities

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Tools/Equipment

Quality Assurance

Quality Assurance

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Lab Research

Browse Applications

Vapor Concentration Control
Semiconductor Manufacturing Process
Vapor concentration control of precursors provide substantial improvement in stabilizing MOCVD processes. By measuring a precursor partial pressure in a downstream line with a Non Dispersive Infrared (NDIR) technology and controlling its total pressure, a precursor concentration can be kept constant. This precursor concentration control is validated as a practical method against a temperature fluctuation of a cylinder bath and a failure of reaching a saturation pressure in a cylinder.
QC of Semiconductors which Feature Thin and Narrow Patterns
Semiconductor pattern - XGT-9000
The combination of microbeam and thickness measurement capability makes the XGT-9000 a useful tool for the QC of semiconductors, which feature thin and narrow patterns. Thickness sensitivity depends on elements traced, but can be at the Angstrom level.
Metal Organic Chemical Vapor Deposition (MOCVD)
Semiconductor Manufacturing Process
The MOCVD process is a recognized controllable synthesis method that uses a variety of precursors like Trimethyl Indium (TMI) and Diethyl Zinc (DEZ) that require a robust delivery method to ensure process repeatability and high yield.
Semiconductor BEOL CMP in Semiconductor Manufacturing Process

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