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FPD Manufacturing Process

FPD Process

HORIBA have fostered various analysis, control, and evaluation technologies for the silicon semiconductor manufacturing processes; a field where strict specifications must be satisfied.

HORIBA makes full use of these technologies in the field of FPD processing. These technologies provide manufacturing support for various types of processes, including gas and liquid medication composition, the detection of particles on masks and thin film measurement. These technologies are also being applied to high-performance analytical and control equipment that supports the research and development of PDPs, organic EL, FEDs, and the diversifying and evolving field of FPDs.

FPD Manufacturing Process

Browse Products

more 51 series

Explosion-proof Gas Analyzer

more CS-100 Series

Stand-alone Type Chemical Concentration Monitor

more CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

more CS-600F

Fiber Optic Type Chemical Concentration Monitor

more CS-700

High Precision, High Stability Chemical Concentration Monitor

more EV 2.0 Series

Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

more FS-3000

Thermal Flow Splitter

more GD-Profiler 2™

Discover a Whole New World of Information with Glow Discharge Optical Emission Spectrometer

more IR-400

High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

more IT-480 series

High-Accuracy Infrared Thermometers [Stationary type]

more LabRAM HR Evolution

Confocal Raman Microscope

more LSC series

Compact Baking System

more LU Series

Liquid Auto Refill System

more Micropole System

Residual Gas Analyzer

more Partica LA-960V2

Laser Scattering Particle Size Distribution Analyzer

more Process

Process Analyzer System

more SEC-E Series

Mass Flow Controller

more SEC-N100 Series

Digital Mass Flow Controller

more SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

more SEC-Z700X Series

Pressure Insensitive Mass Flow Controller


A versatile spectroscopic ellipsometer covering a large range from VUV to NIR

more VA-5000 / VA-5000WM Series

Multi-Component Gas Analyzer

more VC Series

Direct Liquid Injection System

more XGT-7200

X-ray Analytical Microscope

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