D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

Critical semiconductor manufacturing processes continuously desire precision gas flow control devices that enable both future innovation, and lab to fab transition of leading edge memory and logic device. HORIBA's propose the new pressure based MFC D700MG, the upper compatible model of the D500MG to support customer’s challenges.

Segment: Semiconductor

Division: Fluid Control

Manufacturing Company: HORIBA STEC, Co., Ltd.

Selection of countries and territories where this product is available:
China,Germany,Ireland,Israel,Italy,Japan,Korea (South),Malaysia,Singapore,Taiwan,United Kingdom,United States
View the complete list here.

On-Tool Gas and Full Scale Configuration Change *Only EtherCAT
- Provide flexibility to process optimization
100ms Step-up Response & MFC-to-MFC deviation control
- Deliver high productivity and greater process performance
MRMG functionality for small flow rate(Bin101 – Bin105)
- Provide flexibility to process requiring small flow rate
Better Valve Shut-off and Corrosion Resistance by PFA nozzle
- Robustness with less particle risk reduce down time and optimize yield

State Monitor Function
- Provide more internal data for smarter failure prediction

Output items of state monitor function

Flow/Pressure zero adjustment counts

Valve drive counts

Record of max/min P0,P1,P2 pressure

Record of max/min Block temperature

Total time over/below pressure spec.

Total time over/below temperature spec.

Total working time

Total control time

Total flow time (per calibration instance)

Total flow rate (per calibration instance)

Specifications of CRITERION D700MG

Go to External Drawing

D700MG Exterior Drawing A5012467

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