HD-960L

Dissolved Oxygen Monitor in Low Concentration HF HD-960L

HF (Hydrofluoric Acid) DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor

This is a dissolved oxygen monitor designed for low-flow applications, ideal for monitoring the concentration of dissolved oxygen in HF solutions during wet processes.

Equipped with a range switching function that always measures in the optimal range/resolution for dissolved oxygen concentrations ranging from low to high, allowing it to adapt to the specific measurement requirements of each process.

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Automatic range switching
Automatically switches between three measurement ranges, from μg/L order to mg/L order, enabling optimal resolution measurements.

Suitable for measuring small sample volumes
Can measure flow rates as low as 15 mL/min.

Simple calibration function
Equipped with zero calibration for electricity and zero/span calibration functions for gas.

Model Name	HD-960L
Measurement range Repeatability	Measurement range	Repeatability
	0.0 to 200.0 μg/L	+/-1% FS
	200 to 2000μg/L	+/-1% FS
	2.00 to 20.00mg/L	+/-1% FS
Conditions measurement sample	Sample Pressure	0 to 0.1MPa
	Sample flow rate	15 to 200ml /min.
	Sample temperature	10 to 45 °C
	Sample HF concentration	0 to 5000ppm
Transmission output	4-20mA, 4points
Contact output	4 points
Power supply	DC24V +/- 10% 15W
Combined Sensor unit	DO-100
Combined Sensor	#5600
Sample inlet/outlet	1/4 inch tube

Schematics

〈Catalog〉For Semiconductor Manufacturing Process Dissolved Oxygen in Low Concentration HF Meter HD-960L

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