Semiconductor Page Heading

氣體監測儀

HORIBA的製程監控設備透過向各種設備提供回饋控制來提高品質、防止缺陷並有助於提高生產率。

IR-300
IR-300

Vapor Concentration Monitor

IR-400
IR-400

High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

Corporate