0.6
MB
FS-3000 Selecting a model
FS-3000
Thermal Flow Splitter
FS-3000 combines HORIBA STEC’s mass flow controller (MFC) and MuCube (Master controller). By controlling MFC from MuCube equipped with the HORIBA STEC’s proprietary control algorithm, FS-3000 achieves stable splitting control.
Segment: Semiconductor
Division: Fluid Control
The control algorithm realizes stable flow rate splitting control by controlling flow rate ratios, while controlling the pressure of the upper stream of FS-3000 using HORIBA STEC’s original control optimization technology. Furthermore, even when the splitting ratios are altered, the control algorithm realizes high-speed response to flow rate splitting.
- Improve Expandability, Maintenance Performance FS-3000 supports splitting up to 15 flow channels through high-speed signal processing. When MFC fails, FS-3000 can be repaired simply by replacing failed slave only.
- Flexible Response to Required Specifications FS-3000 supports a wide range of gases, including mixed gases. In addition, FS-3000 supports RS-485, DeviceNet as user interfaces.
| Channels | 2-15 Channels | Operating temperature | 5-50°C (recommended range: 15-45°C) |
| Introducing flow rate | Depends on channels and introducing flow rate | Proof pressure | 1000 kpa (G) |
| Ratio setting range | Depends on channels and introducing flow rate | Mounting orientation | Free |
| Supply pressure condition | Depends on channels and introducing flow rate | Control interface | RS-485, DeviceNetTM |
| Valve type | O: Normally open C: Normally close | Power supply | Master, Slave DC24V (Conforming to ODVA standards) |
| Response * | Depends on channels and introducing flow rate |
*The response time of each channel is calculated with the response time being the time when the flow rate output of this product reaches 98% of the flow rate setting change amount. The slowest response time is the response time of the flow splitter.
Selecting a model
