Thermal Flow Splitter
FS-3000 combines HORIBA STEC’s mass flow controller (MFC) and MuCube (Master controller). By controlling MFC from MuCube equipped with the HORIBA STEC’s proprietary control algorithm, FS-3000 achieves stable splitting control.
The control algorithm realizes stable flow rate splitting control by controlling flow rate ratios, while controlling the pressure of the upper stream of FS-3000 using HORIBA STEC’s original control optimization technology. Furthermore, even when the splitting ratios are altered, the control algorithm realizes high-speed response to flow rate splitting.
Channels | 2-15 Channels | Operating temperature | 5-50°C (recommended range: 15-45°C) |
Introducing flow rate | Depends on channels and introducing flow rate | Proof pressure | 1000 kpa (G) |
Ratio setting range | Depends on channels and introducing flow rate | Mounting orientation | Free |
Supply pressure condition | Depends on channels and introducing flow rate | Control interface | RS-485, DeviceNetTM |
Valve type | O: Normally open C: Normally close | Power supply | Master, Slave DC24V (Conforming to ODVA standards) |
Response * | Depends on channels and introducing flow rate |
*The response time of each channel is calculated with the response time being the time when the flow rate output of this product reaches 98% of the flow rate setting change amount. The slowest response time is the response time of the flow splitter.
Selecting a model
Do you have any questions or requests? Use this form to contact our specialists. * These fields are mandatory.
Fiber Optic Type Chemical Solution Concentration Monitor
New concept Pressure Insensitive Mass Flow Controller
Pressure Insensitive Mass Flow Module
Digital Liquid Mass Flow Meters / Controllers
Compact Baking System
POCl3 Auto Refill System
Mixed Injection System Liquid Vaporizers
Pitot Tube Flow Meter
Dual Pitot Tube Flow Meter
Mass Flow Controller
High Temperature Digital Mass Flow Controller
Mass Flow Controller
Digital Mass Flow Controller
Multi Range/Multi Gas Digital Mass Flow Controller
New concept Pressure Insensitive Mass Flow Controller
Pressure Insensitive Mass Flow Controller
Digital Liquid Mass Flow Meters / Controllers
Mass Flow Controller
High Temperature Digital Mass Flow Controller
Mass Flow Controller
Digital Mass Flow Controller
Multi Range/Multi Gas Digital Mass Flow Controller
New concept Pressure Insensitive Mass Flow Controller
Pressure Insensitive Mass Flow Controller