Direct Liquid Injection System
The VC Series is able to rapidly vaporize pure water or other liquid sources without carrier gas, which enables you to construct a more compact vaporization system.
HORIBA can provide you with a custom-made vaporization system consisting of this VC Series and all the other components you need:
Flow rate generated*1 (During TEOS generation)
Max. 5.0 CCM conversion (liquid phase conversion)
TEOS, P(OCH3)3, C6F6
External leak integrity
Internal Leak Integrity
316L Stainless Steel ( polished surface )
Internal heater volume
AC 100V to 120V 70W(35Wx2)
Temperature sensor used
Thermocouple K type (CA)
Liquid inlet: 1/8 inch VCR type male Gas outlet: 1/4 inch VCR type female
*1 Varies depending on the type of liquid.
*CCM is a symbol indicating gas flow rate (mL/min at 25°C, 101.3 kPa).
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