FS-3000

Thermal Flow Splitter

FS-3000은 HORIBA STEC의 MFC(Mass Flow Controller)와 MuCube(Master Controller)를 결합한 제품입니다. FS-3000은 HORIBA STEC의 자체 제어 알고리즘을 탑재한 MuCube의 MFC를 제어함으로써 안정적인 분할 제어를 실현합니다.

Segment: Semiconductor

Division: Fluid Control

The control algorithm realizes stable flow rate splitting control by controlling flow rate ratios, while controlling the pressure of the upper stream of FS-3000 using HORIBA STEC’s original control optimization technology. Furthermore, even when the splitting ratios are altered, the control algorithm realizes high-speed response to flow rate splitting.

Improve Expandability, Maintenance Performance FS-3000 supports splitting up to 15 flow channels through high-speed signal processing. When MFC fails, FS-3000 can be repaired simply by replacing failed slave only.

Flexible Response to Required Specifications FS-3000 supports a wide range of gases, including mixed gases. In addition, FS-3000 supports RS-485, DeviceNet as user interfaces.

Channels	2-15 Channels	Operating temperature	5-50°C (recommended range: 15-45°C)
Introducing flow rate	Depends on channels and introducing flow rate	Proof pressure	1000 kpa (G)
Ratio setting range	Depends on channels and introducing flow rate	Mounting orientation	Free
Supply pressure condition	Depends on channels and introducing flow rate	Control interface	RS-485, DeviceNetTM
Valve type	O: Normally open C: Normally close	Power supply	Master, Slave DC24V (Conforming to ODVA standards)
Response *	Depends on channels and introducing flow rate

*The response time of each channel is calculated with the response time being the time when the flow rate output of this product reaches 98% of the flow rate setting change amount. The slowest response time is the response time of the flow splitter.

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