| Model | OPM-300T | OPM-300T-IRBF | OPM-300R |
| H/W General | Multi sample loading system | ||
| 4 axis motorized stage (XY,Tray,R) | 5 axis motorized stage (XY,Tray,R1,R2) | ||
| Automatically adjustable incidenct angle (Variable AOI between, 300T, 300T-IRBF : 0-45°, 300R : 5-35°) | |||
| Measurable Range | 350-1300 nm | 800-1100 nm | 380-800 nm |
| CCD Pixel Dispersion | 1st : Approx. 0.43 nm 2nd(1100nm~) : Approx. 2.34nm | Approx. 0.2 nm | Approx. 0.21 nm |
| Light Source | UV lamp, Tungsten halogen lamp | Tungsten halogen lamp | |
| Measurement Item | Wavelength at T(R)n%, T(R)% at n wavelength, T(R) Avg/Max/Min, Slope, Δwavelength of different incident angle | ||
| Repeatability / Reproducibility | Related with λ item : 1st ≤±0.3 nm, 2nd(300T only) ≤±1 nm Related with T% item : ≤±0.4% | Related with λ item : 1st ≤±0.3 nm Related with R% item : ≤±0.25% | |
| S/W General | Operator, Engineer, Maintenance mode | ||
| Mapping & Multi Point Measure function by user recipe | |||
| Measurement Capa. ( 1point/filter, 1 angle) | Approx. 216,000 pcs/month(24h x 30d) | ||
| Operating Environment | Place : Clean Room (Class -10,000) | ||
| 15-35℃ | |||
| < 85% RH with no condensation | |||
| Dimension (WxDxH) | 1230 x 1515 x 1142 mm | 1550 x 1515 x 1142 mm | |
| Weight | Approx. < 400 kg | Approx. < 450 kg | |
| Power Spec. | Single phase, 220 V, 15 A | ||
OPM Series
Optical Property Measurement System
OPM Series is a High-Speed Optical Measurement System for Camera Filter Inspection. By automatically exchanging multiple samples and adjusting the incident angle, it measures spectral transmittance and reflectance in the ultraviolet to near-infrared and visible light regions, enabling rapid testing.
OPM-300T
T% measurement system for the blue glass type filters or IR cut filters
• Wide spectral range(350-1300 nm)
• Optimized optical resolution for the mass product
OPM-300T-IRBF
T% measurement system for the IR bandpass-filters(CW 850 or 940 nm)
• Narrow spectral range(800-1100 nm) but higher optical resolution for sharp cut band pass filters
OPM-300R
(Total)R% measurement system for the optical filters
• Covering VIS spectral range(380-800 nm)
• Normal optical resolution
Сегмент: Semiconductor
Подразделение: Metrology
General Features
• Multi-socket sample loading tray(320×320 mm) system, all servo motorized axis for auto slot/position moving, variable incident angle adjust
(0-45˚ for the 300T series, 5-35˚ for the 300R) for film/glass type optical filters.
• Automatic Ref. check for every measurement. (air for T%, R% known high/low samples for Abs. R%)
• Overlapping the User Preset Specification on the R% result graph to help to judge the quality of the product.
• High-speed X-Y mapping function to check the uniformity of the whole sample area.
• OPM series specialized ‘Counter incident angle compensation’ function for the incident angle error from the bowed substrate surface which can
make cut-on/off wavelength judgment error.
• Excepting sample moving time, Approx. tact time is, 2 sec(OPM-300T), 1 sec(OPM-300T-IRBF/OPM-300R) per 1 measurement point.
OPM Series Sample Data
