PLATO-MicroScan

Micro Photoluminescence Mapping System

PLATO-MicroScan is a microscopic PL mapping system that integrates an objective lens onto the PLATO series platform. This objective lens-based micro photoluminescence mapping system enables measurements with a spatial resolution of 1 µm, making it effective for detecting small-scale defects in materials like InP systems.
It also supports improving mass production quality, optimizing MOCVD conditions, and modifying MQW designs through aspects such as bandgap measurement and microdefect detection.
Objective Lens (5×): For microscopic PL mapping and alignment
Objective Lenses (10×, 20×): For microscopic PL mapping

Сегмент: Semiconductor
Подразделение: Metrology

General Features

• Microscopic PL Mapping System
• Spatial resolution: 1 μm
• Compatible with 2-8 inch wafers without hardware modification
• Microscopic PL mapping capability
• Autofocus function
• Fine adjustment via alignment key

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