PLATO-MicroScan

Micro Photoluminescence Mapping System

PLATO-MicroScan is a microscopic PL mapping system that integrates an objective lens onto the PLATO series platform. This objective lens-based micro photoluminescence mapping system enables measurements with a spatial resolution of 1 Β΅m, making it effective for detecting small-scale defects in materials like InP systems.
It also supports improving mass production quality, optimizing MOCVD conditions, and modifying MQW designs through aspects such as bandgap measurement and microdefect detection.
Objective Lens (5Γ—): For microscopic PL mapping and alignment
Objective Lenses (10Γ—, 20Γ—): For microscopic PL mapping

Π‘Π΅Π³ΠΌΠ΅Π½Ρ‚: Semiconductor
ΠŸΠΎΠ΄Ρ€Π°Π·Π΄Π΅Π»Π΅Π½ΠΈΠ΅: Metrology

General Features

β€’ Microscopic PL Mapping System
β€’ Spatial resolution: 1 ΞΌm
β€’ Compatible with 2-8 inch wafers without hardware modification
β€’ Microscopic PL mapping capability
β€’ Autofocus function
β€’ Fine adjustment via alignment key

Π—Π°ΠΏΡ€ΠΎΡΠΈΡ‚ΡŒ ΠΈΠ½Ρ„ΠΎΡ€ΠΌΠ°Ρ†ΠΈΡŽ

Π£ вас Π΅ΡΡ‚ΡŒ вопросы ΠΈΠ»ΠΈ поТСлания? Π˜ΡΠΏΠΎΠ»ΡŒΠ·ΡƒΠΉΡ‚Π΅ эту Ρ„ΠΎΡ€ΠΌΡƒ, Ρ‡Ρ‚ΠΎΠ±Ρ‹ ΡΠ²ΡΠ·Π°Ρ‚ΡŒΡΡ с нашими спСциалистами.

* Π­Ρ‚ΠΈ поля ΠΎΠ±ΡΠ·Π°Ρ‚Π΅Π»ΡŒΠ½Ρ‹ для заполнСния.

Corporate