TMAH Conductivity Meter HE-960TM


The HE-960TM offers high precision measurement of the conductivity of TMAH (Tetra Methyl Ammonium Hydroxide) solutions, the main component of the photoresist developer that is used in semiconductor and liquid crystal processes.
The HE-960TM is also an environmentally-friendly product that uses lead-free solder for mounting chips on the PCB. And, with its 4-electrode FES-126Ni dedicated sensor, this unit has a high chemical resistance and offers a wide range of measurement, perfect conditions for measuring TMAH.


  • Wide measurement range
  • Sutable temperature compensation for TMAH solution
  • Temperature measurement, simultaneous display function
  • Free transmission output range
  • Utilization of lead-free solder
  • CE Marking compliant

Manufactured by HORIBA Advanced Techno




Power supply

Rated voltage 100 V to 240 V AC, 50/60 Hz, 10 VA (max.)


Indoor-use panel installation type Panel:
IP65 dust and water proof structure

Protective structure

Panel: IP65 (IEC60529, JIS C0920)

Conforming standards

CE Marking
FCC Rule

External dimensions

96 (W) mm x 96 (H) mm x 115 (D) mm
Case depth: approx. 105 mm (when panel-mounted)


Approx. 500 g

Compatible sensors

FES-126Ni conductivity sensor

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