Industrial resistivity meter HE-960RW


This resistivity meter is ideal for such applications as the high-precision water monitoring employed at ultra-pure water plants used in semiconductor manufacturing.
They utilize newly designed, high-precision, high-stability temperature measurement circuitry and a vastly improved temperature compensation function, an important element for measuring the resistivity of ultra-pure water.


  • Highly precise, highly stable temperature compensation function
    Control fluctuations in measured values in the region of 18 MΩ·cm resistivity to within a minimum 0.02 MΩ·cm over a water temperature range of 15 °C to 35 °C.
  • 50 m extension possible for sensor cables
  • 2-channel simultaneous measurement
  • Independent 4 contact alarms
  • Abundant in-house calibration equipment
    •HORIBA Advanced Techno resistivity meters are only shipped after cellconstant inspection is performed on the resistivity sensors and inspectionfor temperature sensor instrumental errors is implemented using calibration equipment that has been adjusted with high-traceability reference equipment.
    •The sensors can also be combined with a converter for integrated calibration in advance of shipping.
  • Communication device ability (RS-485)
  • Utilization of lead-free solder

Manufactured by HORIBA Advanced Techno




Sensor input


Cell constant

Approx. 0.01 /cm

Temperature compensation element

Pt 1000 Ω (0 °C)

Measuring range

Resistivity : 0 to 2.00 / 20.00 / *100.0 MΩ·cm
                  (0 to 20.0 / 200.0 / *1000  kΩ·cm)
*; Measurable without temperature conversion

Temperature : 0 to 100 °C
Desalination rate : 0 to 100%


within ±0.1% of the full scale (in equivalent input)


within ±0.1% of the full scale (in equivalent input)

Transmission output

2 output points, Max. load resistance: 900 Ω
4 to 20 / 0 to 20 mA DC : input / output isolated type

  • Transmission output range : Freely selectable within the measurement range. However, repeatability and linearity will remain accurate to the separately set measuring range.

(Negative terminals of each transmission output channel are connected inside and thus have the same electric potential.)

Contact output

4 output points; Alarm contact output (R1, R2, R3, R4)
Contact type : relay contact R1, R2, R3 ; SPST
                                            R4 ; SPDT
Contact rating: 240 V AC 3 A and 30 V DC 3 A
(resistance load)

Communication output


Calibration function

Specific resistance

Ultra-pure water Specific

18.23 (standard), 18.18, 18.24 MΩ·cm
182.3 (standard), 181.8, 182.4 kΩ·cm

Temperature compensation

Temperature compensation for ultra-pure water and impurities
Reference temperature: 5 °C to 95 °C

Temperature compensation range

0 to 100 °C

Ambient environment

Temperature: -5 °C to 45 °C, Relative humidity: 20% to 85% (without dew condensation)

Power supply

100 to 240 V AC ±10%, 50/60 Hz, 15 VA (max)

Protective Structure

Panel : IP65, Rear case : IP20, Terminal : IP00
(Indoor-use panel instrallation type)


Approx. 550 g


CE marking  FCC Part15

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