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Home » Semiconductor Products Product Lines Mass Flow Controller Mass Flow Module

Mass Flow Module

Pressure Insensitive Mass Flow Module D500

Pressure Insensitive Mass Flow Module CRITERION D500

The leading-edge, high performance pressure insensitive mass flow module installed with the differential pressure detection and the piezo actuator valve. Multi range/gas/pressure solution and G-LIFE Self-Diagnosis function.

Pressure Insensitive Mass Flow Controller SEC-Z700X

Pressure Insensitive Mass Flow Controller SEC-Z700X Series

High performance thermal sensor pressure insensitive mass flow module installed with piezo actuator valve. High reliability and all metal.

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