Compact Capacitance Manometers

By: Takehisa Hataita

31 August 2011

Sensing technology, which captures data on physical phenomena and states and converts them into signals, is one of the most fundamental and important contemporary industrial technologies for today’s multi-functional, highly advanced and complex industrial products. In particular, manometers are an essential and integral part of manufacturing processes for semiconductors, flat panel displays (FPD), light emitting diodes (LED) and solar panels, as a wide range of gases and liquids must be controlled during these processes. HORIBA STEC Co., Ltd. has developed a compact, low-cost, highly reliable capacitance manometer that can be mounted on mass flow controllers and many other types of flow and pressure controlling devices.

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