Infrared Thermometer for Semiconductor Production Equipment IT-470F-H

By: Naohiro OHSUGA, Yasuo FURUKAWA

3 January 2016


We developed the infrared thermometer “IT-470F-H” specialized for temperature measurement in the dry etching equipment. Infrared sensor is the most core technology of the infrared thermometer. The infrared sensor installed into “IT- 470F-H” is developed utilizing our original MEMS technology. The infrared sensor has higher responsivity and shorter response time than our previous sensor. With the infrared sensor, the repeatability improves to 0.1°C which is one-third of our previous infrared thermometer (IT-470A). Furthermore, the stability to transient change of ambient temperature improves very well.

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