KOH Monitor HE-960H-KOH
Overview
High precision, wide-range KOH monitor having chemical resistance sensor. Measurement range : 0 - 20%.
Features
- Wide range measurement
Concentration: 0 - 20%, Conductivity: 0 - 1000 mS/cm - High precision
- PFA Sensor
Manufactured by HORIBA Advanced Techno
Specifications
Model name | HE-960H-KOH |
|---|---|
Target of measurement | KOH |
Measurement range | Concentration: 0 - 20%, Conductivity: 0 - 1000mS/cm |
Repeatability | Within +/- 0.5%R.D. or within 0.005wt% whichever is higher (Temperature variation less than +/- 0.5℃, using equivalent input for conductivity) |
Linearity | Within +/- 0.5%R.D. or within 0.005wt% whichever is higher (Temperature variation less than +/- 0.5℃, using equivalent input for conductivity) |
Transmission output | Number of output: 4 |
Contact output | Outputs: 5 points |
Communication output | RS-485 |
Power supply | 24V DC +/- 10% 10W |
Compatible sensor | FES-510 Series |
Wetted material of sensor | GC, PFA, Karletz® |
Schematics
Downloads
- Technical Article
Abstract
"2-pole electrical conductivity sensors with chemical resistant carbon electrodes are developed in 2002. These sensors are installed in the semiconductor wet process and used as a densitometer practically. The electrical circuit for 4-pole measurement was an innovation which improved the interface problem to the any 4-pole sensors. Single component concentration of HF or TMAH is measured from the conductivity, based on the precise measurement of conductivity and temperature, via individual temperature compensation of conductivity. Etching or developing solution should be controlled severely. Needs for monitoring solution based on the application of conductivity method are increased."