Cathodoluminescence (CL) is optical emission in the UV-VIS-NIR range that results from excitation of a material using an electron beam. Due to the requirement for electron beam excitation, many CL systems are implemented as add-ons to electron beam instruments such as SEMs. CL is a high spatial resolution technique that enables the non-contact probing of many material properties that may not be accessible through optical or other excitation mechanisms.
In this webinar, we present a flexible and modular CL system that can be added to most common SEM instruments. The flexibility and modularity of the system enables selection of components to fit most spectroscopic, budgetary or space constraints. Furthermore, we show the application of CL technique in such fields as defect analysis in Semiconductors and mineralogy.