Non-Contact Chemical Concentration Monitor
In order to fulfil the tight chemical concentration control required in semiconductor WET process, HORIBA realizes higher functionality to meet the needs by designing compact equipment while maintaining stable measurement and carrying out operator safety through its original sensor design.
Zero contamination is made possible by directly connecting a sensor externally to the PFA piping. This removes the need for plumbing construction when attaching the sensor, which reduces chemical accidents. In addition, by upgrading the optical system, the equipment has been made more compact while retaining the original specifications of CS-600F*1.
Light source and light detector have been integrated into cell unit.
Panel mount display (9.6cm x 9.6cm)
Use of LED lamp Increases lifespan (5 years warranty)
Semi-annually BG compensation cycle
Piping installation is not required when installing the product, which helps to reduce accidents such as chemical leak.
*1 CS-600 is HORIBA's optical liber type chemical concentration monitor.
Measurement Frequency: every 3 seconds
Moving Average: 16 times
Temperature: room temperature
Pipe Diameter: 3/4 inch
Initial Sample Concentration
NH3 : 0.95% H2O2 : 5.15% H2O: 93.9%
Sample (real liquid) measured for 1 hour shows excellent stability.
|Model name||Non-contact type chemical concentration monitor|
|Measurement method||Absorption spectroscopy|
|Concentration calculation||Temperature compensated multivariate analysis|
|Component||Measurable range||Repeatability||Analog output range|
Conditions of measurement
|1) Measurement Frequency: every 3 seconds|
2) Moving average : 16 times
|PFA tube 1inch or 3/4inch (Do NOT use anti-static type PFA tube)|
|Sample temperture : 20 to 80°C|
Sample temperture, Atmospheric temperture fluctuation :
±1 degree C (period of time: 1 hour)
Sample pressure : Less than 0.2 MPa (G)
Sample pressure fluctuation : Within 0.02 MPa
|Apporox. 30W (Transient electric current at the time of start is excluded)|
|Weight||Display unit : Apporox. 0.9kg|
Sensor unit: Apporox. 2.9kg
|Dimension (WxDxH)||Display unit : 96x135x96mm|
Sensor unit: 238x135x190mm
|Slanting angle||Sensor unit:|
Vertical direction within ±3 degree
Lateral direction 0 to 90 degree
|communication||Parallel I/O, RS-232C, Analog output|
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