In-line Sensor & Auto Range Switching Concentration Monitor
Incorporating a sensor with completely PFA (perfluoroalkoxy) wetted parts, size is optimized to the absolute limit. It can also handle wide-range measurements up to 50% HF concentration, matching the sanitary requirements in semiconductor processes.
Wide-range Compatible
The auto-ranging feature, from low concentration to high concentration (up to 50% HF concentration), enables optimal measurement performance at each target concentration.
Contamination-free
Employing a sensor with a sanitary structure, using only PFA as the wetted material. Being a chemically resistant sensor, it is capable of measuring various chemicals used in semiconductor processes.
High Stability/Reproducibility Accuracy
Including a temperature measurement sensor, HF sample measurements up to 80°C can be accommodated. It achieves a reproducibility accuracy of ±0.5% FS.
Concentration Conversion Function
Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with temperature characteristics. It is particularly suitable for the dilution management of low-concentration chemical solutions.
| Model name | HF-960EM |
|---|---|
| Measurement range | HF: 0 - 50%, HCl: 0 - 10%, Conductivity: 0 - 2000 mS/cm |
| Repeatability | +/- 0.5% F.S. (in equivalent input) |
| Linearity | +/- 0.5% F.S. (in equivalent input) |
| Transmission output | Number of output: 4 |
| Contact output | Outputs: 5 points |
| Contact input | Inputs: 2 points |
| Communication output | RS-485 |
| Power supply | DC 24 V +/- 10% 15W |
| Compatible sensor | CM-520 Series |
| Wetted material of sensor | PFA |
Schematics
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