
Wide-range Compatible
The auto-ranging feature, from low concentration to high concentration (up to 50% HF concentration), enables optimal measurement performance at each target concentration.

Contamination-free
Employing a sensor with a sanitary structure, using only PFA as the wetted material. Being a chemically resistant sensor, it is capable of measuring various chemicals used in semiconductor processes.

High Stability/Reproducibility Accuracy
Including a temperature measurement sensor, HF sample measurements up to 80°C can be accommodated. It achieves a reproducibility accuracy of ±0.5% FS.

Concentration Conversion Function
Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with temperature characteristics. It is particularly suitable for the dilution management of low-concentration chemical solutions.