SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Controller

The SEC-Z700S Series is equipped with new developed thermal sensors and a pressure insensitive function for stable flow rate control. The on-board pressure measurement reduces the cost, size and complexity of gas delivery systems.

A new high-performance function provides a simplified gas supply system. Typical multi chamber gas lines have a line regulator, pressure sensor and filter to avoid the mass flow controller crosstalk phenomenon caused by pressure fluctuations.

The SEC-Z700S Series demonstrates high stability and controls the gas flow without effecting the upstream and downstream pressure fluctuations. Flow rate output, temperature and pressure readings are provided.

Segment: Semiconductor
Division: Fluid Control
Manufacturing Company: HORIBA STEC, Co., Ltd.

Basic Features

  • Multi Gas / Multi Range function. The gas type and full scale flow rate can be changed by the customer
  • Stable control of the gas flow without effect by upstream and downstream pressure fluctuations
  • On board Multi display
  • Ultra clean design - metal diaphragm, all stainless SUS-316L and polished surface treatment (standard)
  • Compact size Same fitting to fitting dimension up to 50 SLM
  • Signal compatibility: EtherCAT, DeviceNet Model

 

Key Features

  • Warranty 1% Set Point high accuracy (Flow rate ≥5%)
  • High repeatability (≤±0.15% Set Point/Flow rate ≥5%)
  • Wide range control (0.5-100% Full Scale)
  • Tunable response (300ms≦t≦1000ms)
  • High operation temperature (15-60℃)
  • Low seat leak performance (≤0.1% Full Scale/Bin#01-#06)
  • High corrosion resistance design
ModelSEC-Z714SMG *10 / SEC-Z717SMG *11SEC-Z724SMG *10 / SEC-Z727SMG *11
Full-scale flow rate
(N2 conversion flow rate)
MR.MG number
#01 : 30 SCCM

MR.MG number
#02 : 100 SCCM

#03 : 300 SCCM
#04 : 1 SLM #05 : 3 SLM

MR.MG number
#06 : 10 SLM
MR.MG number
#07 : 30 SLM
#08 : 50 SLM
Flow rate accuracy *1 *2≤± 1.0 %S.P. (Flow rate ≥ 5 %) ≤± 0.05 %F.S. (Flow rate < 5 %)
Linearity *1≤± 0.5 %F.S.
Repeatability *1 *3≤± 0.15 %S.P. (Flow rate ≥ 5 %) ≤± 0.0075 % F.S. (Flow rate < 5 %)
Zero point temperature effect≤± 0.01 %F.S./℃
Span temperature effect≤± 0.05 %F.S./℃
Zero point output stability *4≤± 0.3 %F.S./year
Flow rate control range0.5-100 %F.S. Auto close function : ≤ 0.25 %F.S.
Step-up flow response time *5450 ± 30 ms (0 %F.S. → 5 %F.S. < T ≤ 100 %F.S.) ≤ 600 ms (0 %F.S. → 2 %F.S. < T ≤ 5 %F.S.) ≤ 1 s (0 %F.S. → 0.5 → F.S. < T < 2 → F.S.)
Step down flow response time *5450 ± 30 ms (100 %F.S. → 10 %F.S. < T ≤ 80 %F.S.) ≤2 s (100 %F.S. → 0.5 %F.S. < T ≤ 10 %F.S.) ≤200 ms (100 → F.S. → 0 %F.S. (Valve closed))
Flow response time adjustment
(Tunable Response) *5 *6
Tunable range 300 ms ≤ T ≤ 1000 ms (0.3 s ≤ T ≤ 1 s)
Adjustment accuracy User specified time ± 50 ms (± 0.05 s)
Supply pressure condition≤ 450 kPa (G)
Operating differential pressuremax400 kPa (D)
min100 kPa (D) (Supply pressure < 150 kPa (A))
50 kPa (D) (Supply pressure ≥ 150 kPa (A))
100 kPa (D)200 kPa (D)
Proof pressure1 MPa (G)
Flow rate at fully closed control valve *7≤ 0.1 %F.S.(N.C.valve) ≤ 0.2 %F.S.
(N.O.valve) ≤ 0.5 %F.S.
Pressure transient sensitivity *8≤± (1.5 %F.S. + 1.5 %S.P.)≤± 1.0 %F.S.
Pressure measurement accuracy≤± 3.5 kPa (Measurement range : 0-700 kPa (A))
Operating temperature *915-60℃
Temperature measurement accuracy≤± 2℃ (Measurement range : 15-60℃)
Leak integrity

≤ 5 × 10-12 Pa • m3/s (He)

Valve typeNormally closed : N.C. Normally opend : N.O.
Wetted materialsSUS316 L, Ni-alloy, PFA (Bin#01-#04)
Fitting

1/4 inch VCR equivalent fitting-to-fitting dimension 124 mm

1.125 inch C-Seal Port-to-port dimension 92 mm

1.125 inch W-Seal Port-to-port dimension 92 mm

Communication interface

M12 (5 pin) male connector DeviceNet™protocol *10

RJ45 connector × 2

EtherCAT®protocol *11

Service communication port

φ2.5 port

Dedicated RS-485 communication

Power supply

M12 (5 pin) male connector 24 VDC, 7.5 VA Applicable for ODVA standard *10

M8 (5 pin) male connector

24 VDC ± 4 V, 7.5 VA *11

Weight1.3kg *10   /   1.1kg *11
Mounting orientationFree
Warm-up operation time≥ 60 minutes
Storage temperature0-80℃ (Non condensing)

*1: Value applicable to a calibration gas (N2) or the gas types measured with our benchmark equipment. *2: Flow rate accuracy with the ambient temperature at 23 ± 2℃ (in compliance with SEMI E56-0309). *3: Complies with
"repeatability" as defined by SEMI E56-0309. *4: Zero point output stability in compliance with SEMI E69-0298. *5: The response time is defined as the time that it takes for the product's flow rate output to reach 98 % of the amount of
the change set for the flow rate. For any change in flow rate control to 0 %F.S. (valve closed), the response time is defined as the time it takes for the product's flow rate output to reach 0.5 %F.S. *6: The value in our conditions as
based on the use of a calibration gas (N2). *7: Flow rate when the control valve is fully closed and a calibration gas (N2) is supplied at 450 kPa (G). *8: Flow rate variation amount where a 2 psi pressure change (in compliance with
SEMI F64-0701) occurs in a 1second period when flow rate control is applied between 5 %F.S. and 100 %F.S. in our conditions as based on the use of a calibration gas (N2). *9: The product's temperature output constitutes the
benchmark. The product's temperature may rise higher than the environmental temperature if a source of heat exists in the vicinity of the product or if multiple units of the product have been installed in close proximity to each other.
*10: DeviceNet™ communication model. *11: EtherCAT® communication model.

  • In notation of pressure unit, (D) shows differential pressure, (G) shows gauge pressure, (A) shows absolute pressure. ???? SCCM, SLM are symbols representing the gas flow rate (ml/min, l/min, at 0℃ 101.3 kPa).
  • % F.S.is the percentage of the set full scale flow rate. % S.P. is a percentage of the set flow rate setting.

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