Vapor Concentration Monitor
The Metal-Organic Chemical Vapor Deposition (MOCVD) process is widely used in the manufacture of LEDs, optical devices and other components. Liquid and solid precursors are delivered to the reaction chamber by controlling the temperature, pressure and the carrier gas flow rate (bubbling method). The in-line IR-300 Series measures and reports the precursor concentration in real time giving the user the following benefits:
A high optical intensity and long-life light source combined with high-speed signal processing enables the IR-300 Series to achieve faster, more repeatable responses to changes in precursor concentration. These features give the user a true understanding of the actual process though real-time inline concentration measurement.
■Experiment flow sheet
■Monitoring of precursor concentration change
Here is an example in which the concentration of the supplied precursor—which changes due to adjustment of the pressure in the bubbler by the back pressure regulator—was monitored in real time.
Reliable, High-performance
Non-dispersive Infrared Absorptiometry (NDIR)
The infrared absorptiometry method employed by the IR-300 Series uses the principle of measuring the absorption of gas molecules in infrared light emitted from an infrared light source. A sample output from a sample that has absorbed the gas being measured is compared to a reference output with no absorbance, and the result is converted into a gas concentration. The use of this double beam method enables long-term, stable measurement results to be obtained.
The optical system is made up of a light source, gas cell and double beam detectors. The stability of the double beam detector has been proven over a period of more than 40 years.
Do you have any questions or requests? Use this form to contact our specialists. * These fields are mandatory.
Compact Baking System
Air Pollution Monitor
Ambient Ammonium Monitor
Ambient Hydrogen Sulfide Monitor
Stack Gas Analysis System
FTIR Exhaust Gas Analyzer Dilute Measurement Type
FTIR Exhaust Gas Analyzer Direct Measurement Type
Stack Gas Analyzer
Heated Type NOx Analyzer
Heated Type THC Analyzer
Motor Exhaust Gas Sulfur Analyzer
Motor Exhaust Gas Analyzer
FTIR Motor Exhaust Gas Analyzer
Laser Spectroscopic Motor Exhaust Gas Analyzer
On-board Emissions Measurement System
On-board Emissions Measurement System for NH3/N2O
Portable Gas Analyzer
Multi-Component Gas Analyzer
Air Pollution Monitor
Oxygen/Nitrogen/Hydrogen Analyzers
Carbon/Sulfur Analyzer
Stack Gas Analysis System
Stack Gas Analyzer
Motor Exhaust Gas Analyzer
On-board Emissions Measurement System
On-board Emissions Measurement System for NH3/N2O
Portable Gas Analyzer
Multi-Component Gas Analyzer