Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
UR-Z700 Series
Digital Automatic Pressure Regulator
The UR-Z700 Series is the auto pressure regulator equipped with a digital control circuit that uses a high-accuracy pressure sensor and a high-resolution, fast-response piezoelectric valve. It can be remotely operated by various external signals and automatically controls pressure. The all-metal gas contacting part minimizes dead volume, making it ideal for corrosive gases and low vapor pressure gases.
- Stable pressure control even in lines that experience instantaneous fluctuations
- Simplification of the gas line enables significant reduction of dead volume
- Vessel pressure during liquid bubbling can be set arbitrarily
- Supports digital/analog, DeviceNet™, and EtherCAT® communication
