Chamber Health Monitoring

Monitor chamber conditions not only during the process, but also before and after the process

Exhibition Panels

For detecting abnormalities in the chamber, checking conditions before and during the process, and predicting maintenance time


Product Catalogs

Gas Monitor

IR-400

High-Accuracy Non-Contact Thermometer

IT-470F-H

Quadrupole Mass Analyser

Micropole System

Vapor Concentration Monitor

IR-300

Corporate