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Chamber Health Monitoring

Monitor chamber conditions not only during the process, but also before and after the process

Exhibition Panels

For detecting abnormalities in the chamber, checking conditions before and during the process, and predicting maintenance time


Product Catalogs

Capacitance Manometer

VG-200S

Vapor Concentration Monitor

IR-300

Gas Monitor

IR-400

Quadrupole Mass Analyzer

MICROPOLE System QL Series

Optical Emission Spectroscopy

EV2.0

Infrared Thermometer

IT-270

Infrared Thermometer

IT-480

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