Fluid Control

Fluid Control

Measurement and control technology in semiconductor manufacturing process chambers

Exhibition Panels

Measurement and control technology in semiconductor manufacturing process chambers

Measurement and control technology in semiconductor manufacturing process chambers

Product Catalogs

High Performance Thermal Mass Flow Module

SEC-Z700S Series

Differential Pressure Ultra-thin Mass Flow Controller

DZ-100

Thermal Flow Splitter

FS-3000

Wafer Backside Pressure Control System

GR-300 Series

High Performance Liquid Vaporization System

XF-100\MV-2000 Series

Thermal Mass Flow Controller

SEC-Z500X Series

Differential Pressure Mass Flow Controller

CRITERION D500

Corporate