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Fluid Control

Fluid Control

Measurement and control technology in semiconductor manufacturing process chambers

Exhibition Panels

Measurement and control technology in semiconductor manufacturing process chambers

Measurement and control technology in semiconductor manufacturing process chambers

Product Catalogs

NEW!! High Speed & Precision Pressure Insensitive Mass Flow Module

D700MG

NEW!! Wide Range Pressure Insensitive Mass Flow Module

D700WR

Differential Pressure Mass Flow Controller

CRITERION D500

Differential Pressure Ultra-thin Mass Flow Controller

DZ-100

High Performance Thermal Mass Flow Module

SEC-Z700S Series

Thermal Mass Flow Controller

SEC-Z500X Series

Thermal Flow Splitter

FS-3000

Auto Pressure Regulator

GR-511F

High Performance Liquid Vaporization System

XF-100\MV-2000 Series

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