• Multi gas monitoring (Supported SiF₄ andCF₄) (IR-422)
• High sensitivity
• Gas cell heating function up to 180 dec.C
• Multi-display
• Analog/Digital communication.

Benefits of real-time end-point monitoring with the IR-400

• Reduce time for chamber cleans
• Reduce usage of cleaning gases
• Repeatable and predictable clean process
• Longer lifetime of chamber components

Applications example

• Monitoring chamber exhaust line

Measurement Techniques

Reliable, High-performance
Non-dispersive Infrared Absorptiometry (NDIR)

The infrared absorptiometry method employed by the IR-300 Series uses the principle of the absorption by gas molecules of the infrared light emitted from an infrared light source. A sample output from a sample that has absorbed the gas being measured is compared to a reference output with no absorbance, and the result is converted into a gas concentration. The use of this double beam method enables long-term, stable measurement results to be obtained.

The optical system is made up of a light source, gas cell and double beam detectors. The stability of the double beam detector has been proven over a period of more than 40 years.